By Vijay K. Varadan, K. J. Vinoy, S. Gopalakrishnan
Featuring unified insurance of the layout and modeling of clever micro- and macrosystems, this ebook addresses fabrication matters and descriptions the demanding situations confronted by way of engineers operating with shrewdpermanent sensors in various purposes.
half I offers with the elemental strategies of a regular shrewdpermanent process and its constituent parts. initial fabrication and characterization options are brought prior to layout ideas are mentioned intimately. half III offers a finished account of the modeling of clever platforms, shrewdpermanent sensors and actuators. half IV builds upon the basic options to investigate fabrication thoughts for silicon-based MEMS in additional aspect.
practising engineers will enjoy the special evaluation of purposes in communications know-how, aerospace, biomedical and mechanical engineering. The booklet presents a necessary reference or textbook for graduates following a direction in shrewdpermanent sensors, actuators and platforms.