Download Silicon Nitride for Microelectronic Applications: Part 1 by John T. Milek PDF

By John T. Milek

The great amount of literature at the expertise of skinny movie silicon nitride indi­ cates the curiosity of the dept of protection, NASA and the semiconductor within the improvement and whole usage of the fabric. This survey is anxious in simple terms with the skinny movie features and homes of silicon nitride as at present used by the semiconductor or microelectronics undefined. it's also a few of the equipment of training. functions in microelectronic units and circuits are to be supplied partly 2 of the survey. a few bulk silicon nitride estate facts is integrated for easy reference and comparability reasons. The survey particularly excludes references and knowledge no longer in the public area. ACKNOWLEDGEMENT This survey was once generated less than U.S. Air strength agreement F33615-70-C-1348, with Mr. B.R. Emrich (MAAM) Air strength fabrics Laboratory, Wright-Patterson Air strength Base, Ohio appearing as venture Engineer. the writer wish to recognize the assis­ tance of Dr. Judd Q. Bartling, Litton platforms, Inc., information and keep watch over structures department, forest Hills, California and Dr. Thomas C. corridor, Hughes airplane corporation, Culver urban, California in reviewing the survey. v CONTENTS Preface. i creation 1 Literature evaluation. 1 Bulk features 1 know-how evaluation. 2 References four tools of instruction • five advent • five Direct Nitridation procedure eight Evaporation process • nine Glow Discharge technique. 10 Ion Beam process. thirteen Sputtering tools thirteen Pyrolytic equipment. 15 Silane and Ammonia response 15 Silicon Tetrachloride and Tetrafluoride response. 24 Silane and Hydrazine response 27 creation Operations. 28 Equipment.

Show description

Read Online or Download Silicon Nitride for Microelectronic Applications: Part 1 Preparation and Properties PDF

Similar electronics books

Systems Thinking and E-participation: Ict in the Governance of Society (Advances in Electronic Government Research (Aegr) Book Series)

Structures pondering and E-Participation: ICT within the Governance of Society offers a systemic-based inquiry platform to discover limitations, limits, and merits of knowledge and communique expertise use in public choice making procedures. This booklet examines the influence of governmental applied sciences helpful to these concerned with politics, sociology, and data platforms.

Entrepreneurial ecosystems

In today’s quickly altering enterprise panorama, entrepreneurship is turning out to be and actively promoted through coverage makers. a number of reviews discover the impact of entrepreneurship at the financial system and positioned a few emphasis on its optimistic impact GDP in step with capita, unemployment and exports. although, entrepreneurship doesn't move in line with se and it truly is now greatly admitted that the choice of the entrepreneur is narrowly hooked up with its surroundings, the so-called entrepreneurial atmosphere.

Digital Systems (12th Edition)

For all classes in electronic electronics, from introductory via complicated. Like past variants, this article is going to be used generally in know-how periods starting from excessive colleges and two-year courses to four-year engineering, engineering expertise, and laptop technology courses.   Take a trip in electronic platforms from beginner to specialist Written for all classes in electronic electronics—from introductory to complex, from highschool to 2- and four-year university programs—this 12th variation of electronic platforms completely prepares scholars for the learn of electronic structures and laptop and microcontroller undefined.

Extra resources for Silicon Nitride for Microelectronic Applications: Part 1 Preparation and Properties

Example text

5,1970. p. 536-538. 30. G. et al. Development of Silicon Nitride and Cermet Resistors for Use in a Binary Counter, Metal Insulator Field Effect Transistor Circuit. Texas Instruments Rept. no. 03-68-42, Mar. 1968. 147 pp. NASA N69-10283. 31. E. et al. Electrical Properties of Vapor-Deposited Silicon Nitride and Silicon Oxide Films on Silicon. , v. 115, no. 3, Mar. 1968. p. 300-307. 32. E. 33. G. Depositing Silicon Nitride Layers at Low Temperature Using a Photochemical Reaction. , v. 116, no. 1, Jan.

V. 30, 10. OKADA, K. et al. Properties of Thermally Grown Silicon Nitride Films. SOC. OF JAPAN, v. 23, no. 3, Sept. 1967. p. 655. 11. M. The Stabilization of Silicon Surfaces Using Silicon Nitride. J. , D, ser. 2, v. 1,1968. p. 1409-1420. 12. FELDMAN, C. and M. HACSKAYLO. Temperature Characteristics of Vacuum Deposited Dielectric Films. REV. OF SCI. INSTRUMENTS, v. 33, Dec. 1962. p. 1459-1460. 13. ELLIOTT, E. et al. Some Properties of Electron Beam Evaporated Si3N4 Films. THIN SOLID FILMS, v.

7, yuly 1967. p. 717-722. 8. T. et al. Silicon Nitrides. Some Physicochemical Properties. J. , LONDON, v. 8,1958. p. 296-302. 9. HECKINGBOTTOM, R. G. HALLIWELL. Direct Nitridation of the Si(lll) Surface: A Low Energy Electron Diffraction Study. , Rept. no. 61, Dec. 1968. 17 pp. NASA N70-18189. ELECTROCHEM. , J. , v. 30, 10. OKADA, K. et al. Properties of Thermally Grown Silicon Nitride Films. SOC. OF JAPAN, v. 23, no. 3, Sept. 1967. p. 655. 11. M. The Stabilization of Silicon Surfaces Using Silicon Nitride.

Download PDF sample

Rated 4.92 of 5 – based on 47 votes